|
|
| |
 |
> ABG10000
ㆍ Air bearings for ultra smooth motion
ㆍ All axes are fully preloaded
ㆍ Dual linear-motor-driven lower axis
ㆍ Travel to 1 m x 1 m
ㆍ Options include: machine base, z axis, vibration isolation,
and control enclosure |
|
| |
| Travel |
250 mm x 250 mm
|
500 mm x 500 mm
|
750 mm x 750 mm
|
1000 mm x 1000 mm
|
| Motor Type |
BLM-264-A
|
| Linear Encoder |
LT (20 ㎛ fundamental) or LN (4 ㎛ fundamental)
|
| Resolution |
0.005 ㎛ - 1.0 ㎛ (LT); 0.001 ㎛ - 0.2
㎛ (LN)
|
| Accuracy |
±2 ㎛(HALAR)
|
Repeatability
(Bi-Directional) |
±0.5 ㎛ (HALAR)
|
| Straightness |
±1 ㎛
|
±2 ㎛
|
±2 ㎛
|
±3 ㎛
|
| Flatness |
±4 ㎛
|
±6 ㎛
|
±12 ㎛
|
±14 ㎛
|
| Roll |
±2 arc sec
|
±3 arc sec
|
±4 arc sec
|
±5 arc sec
|
| Pitch |
±6 arc sec
|
±8 arc sec
|
±13 arc sec
|
±15 arc sec
|
| Yaw |
±1 arc sec
|
±2 arc sec
|
±3 arc sec
|
±4.5 arc sec
|
| Maximum Speed |
1000 mm/s
|
| Moving Mass |
x-axis (upper) |
9 kg
|
9 kg
|
9 kg
|
9 kg
|
| y-axis (lower) |
64 kg
|
70 kg
|
77 kg
|
84 kg
|
| Stage Mass (not including risers
or granite base) |
260 kg
|
282 kg
|
303 kg
|
325 kg
|
| |
|
