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ANT-25L/-50L ALS130 ALS135 ALS1000 ALS3600 ALS5000 ALS5000WB ALS20000
ALS25000 MaskAlign 100 ATS50 ATS100 ATS125 ATS150 ATS0300 ATS1000
ATS1100-H ATS1500 ATS2000 ATS3600 ATS5000 ATS5000WB ATS6200
 
> ANT-25L/-50L

ㆍ 5 nm linear resolution
   (300 picometer resolution with Automation 3200)
ㆍ Turnkey drive and control electronics
ㆍ Noncontact, non-cogging, direct-drive
ㆍ Ultra-quiet linear servo drives
ㆍ High speed, real-time axis calibration
 

ANT-25L XY/ 50LXY

25 mm

50 mm
Length x Width x Height
100 mm x 100 mm x 66 mm
141 mm x 141 mm x 66 mm
Travel
25 mm x 25 mm
50 mm x 50 mm
Resolution
5 nm
Accuracy
±0.3 ㎛ per axis
±3 ㎛ standard
±0.3 ㎛ per axis
±5 ㎛ standard
Repeatability
±50 nm (±2 uin) per axis ±100 nm (±4 uin)
Max Load
5 kg
Velocity
250 mm/s
Hominal Stage Weight
0.8kg (1.8lb)
1.2kg(2.7lb)
 


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