| Total
Travel |
50
mm (2 in) x 50 mm (2 in) x 25 mm (1 in) |
150
mm (6 in) x 150 mm (6 in) x 25 mm (1 in) |
| Drive
System |
Linear
Brushless Servomotor |
| Feedback |
Noncontact
Linear Encoder |
| Resolution |
10 nm (0.4 μin)(300 picometers with Automation 3200)
|
| Maximum
Travel Speed |
100
- 250 mm/s (4 - 10 in/s) |
150
mm/s (6 in/s) |
| Maximum
Load |
5.0
kg (11.0 lb) |
10.0
kg (22 lb) |
| Accuracy |
±0.3 μm (±12 μin) per axis; ±3 μm (±120 μin)
|
| Bidirectional
Repeatability |
±50 nm (±2 μin) per axis; ±100 nm (±4 μin)
|
| Orthogonality |
10
arc sec |
5
arc sec |
| Material
|
Aluminum |
| Finish |
Black
Anodize |
