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ABR1000 ACS Series ASR1000 ASR1200 ASR1100 ADR75 ADR160 ADR175
ADR240 ADRS ADRT ARA125 ART300 ARA1000 WaferMax T ART50
ART100
 
>ABR1000

¤ý Direct-drive slotless brushless servomotor
¤ý Zero cogging motor for outstanding velocity stability
¤ý Outstanding error motion and wobble performance
¤ý Direct coupled, high accuracy rotary encoder
¤ý Wafer and disk accessories available
 

ABR1000 Series

 

Table Diameter
229.1 mm
Total Travel
¡¾360¡Æ Continuous
Drive System
Direct-Drive Brushless Servomotor
Feedback
Directly-Coupled Rotary Encoder
Resolution
0.13-26.7 ¥ìrad (0.027-5.5 arc sec)
Maximum Rotary Speed
500 rpm
Accuracy
¡¾9.7 ¥ìrad (¡¾2 arc sec)
Bidirectional Repeatability
<4.9 ¥ìrad (<1 arc sec)
Maximum Load Axial
650 N
Radial
350 N
Tilt
28 N-m
Torque Output Peak
11.7 N-m (8.6 lb-ft)
Continuous
2.8 N-m (2.1 lb-ft)
Inertia (Unloaded)
34,000 kg-mm2
Synchronous Error Motion Axial
<100 nm
Radial
<250 nm
Tilt
<1.2 ¥ìrad (<0.25 arc sec)
Asynchronous Error Motion Axial
<20 nm
Radial
<20 nm
Tilt
<0.1 ¥ìrad (<0.02 arc sec)
Operating Pressure
80 psig (5.5 bar) ¡¾ 5 psig (0.3 bar) unless otherwise specified
Air Consumption
<2 scfm
Stage Mass
13.6 kg (30 lb)
Material Stage Shaft
Aluminum
Table Body
Aluminum
Finish Stage
Hard Coating (62 Rockwell Hardness; Teflon¢ç Impregnated)
Table
Hard Coating (62 Rockwell Hardness; Teflon¢ç Impregnated)
 


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