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ANT-4V AVL125 AVL1000 AVS105 AVS100 WaferMax Z
 
> ANT-4V

ㆍCompact construction
ㆍ Outstanding rigidity
ㆍ Noncontact direct drive
ㆍ 2 nm resolution; 60 picometers with
   Automation 3200
ㆍ High repeatability
ㆍ Outstanding in-position stability
 

ANT-4V (Vertical Lift Stage)
Length x Width x Height
118 mm x 90 mm x 53 mm
Travel
4 mm
Resolution
2 nm (60 picometers with Automation 3200)
Repeatability
±50 nm (±2 μin); ±100 nm (±4 μin)
Accuracy
±2 μm standard; ±0.2 μm calibrated
Pitch
10 arc seconds
Roll
10 arc seconds
Yaw
10 arc seconds
Max Load
4 kg
Velocity
50 mm/s
Nominal Stage Weight
1.4 kg (3.1 lb)
 


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